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The largest market share of MEMS products currently belongs to. microfluidics. microsensors. microaccelerometers.

MEMS components range in size from. 1 µm to 1 mm. 1 mm to 1 µm. 1 mm to 1 cm.

One nanometer is. 10^−6 m. 10^−9 m. 10^−12 m.

When we say a device is in mesoscale, we mean the device has a size in the range of. 1 µm to 1 mm. 1 mm to 1 µm. 1 mm to 1 cm.

The origin of microsystems can be traced back to the invention of. transistors. integrated circuits. silicon piezoresistors.

A modern integrated circuit may contain. 100,000 transistors and capacitors. 1,000,000 transistors and capacitors. 10,000,000 transistors and capacitors.

Miniaturization of computers was possible mainly because of. better storage systems. replacing vacuum tubes with transistors. the invention of integrated circuits.

In general, a microsystem consists of. one components. two components. three components.

The microsensor that is commonly used in air bag deployment systems in automobile is a. pressure sensor. inertia sensor. chemical sensor.

“Laboratory-on-a-chip” means. performing experiments on a chip. integration of microsensors and actuators on a chip. integration of microsystems and microelectronics on a chip.

The origin of modern microfabrication technology is. the invention of transistors. the invention of integrated circuits. the invention of micromachining.

The very first significant miniaturization occurred with. integrated circuits. laptop computers. mobile telephones.

The term micromachining first appeared in public in. the 1970s. the 1980s. the 1990s.

The term LIGA refers to. a process for micromanufacturing. a microfabrication process. a material treatment process.

A typical single ULSI chip may contain. one transistors. 10 transistors. 100 million transistors.

The development of integrated circuits began in. the 1960s. the 1970s. the 1950s.

The first digital computer, ENIAC, was developed in. the 1960s. the 1950s. the 1940s.

The aspect ratio of a microsystem component is defined as the ratio of. the dimensions in the height to those of the surface. the dimensions of the surface to those of the height. the dimensions in width to those of the length.

Market value of microsystems is intimately related to. volume demand. special features. performance of the products.

The most challenging issue facing microsystems technology is. the small size of the products. the lack of practical applications. its multidisciplinary nature.